A Study of Designing a CORBA-based Manufacturing Execution System to Wafer Fab

• Main Authors: Hsien-Yi Wu, 吳憲宜
• Other Authors: Hsin Rau
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/27692148101514585721

碩士 === 中原大學 === 工業工程學系 === 87 === Shortening cycle time, decreasing production cost, increasing manufacturing flexibility, increasing equipment utilization, and promoting quality are the main goals of the production management for semiconductor manufacturing plants. Due to the complexity of wafer fabrication processes, there is a need for providing management information systems working with automated manufacturing systems. Manufacturing execution system（MES）is suitable for this requirement. This study adopts the CORBA technology developed by the OMG, as a framework for developing a MES. This study also analyzes various distributed architectures for providing the best one for the MES. Then, based on the best architecture, a procedure for building the CORBA-based MES is proposed. First, this study uses the Unified Modeling Language (UML) to perform system analysis and design in order to develop a MES object system. Then, this research uses the Interface Definition Language (IDL) to design the distributed object interface. Finally, following the results of MES analysis and design and using the CORBA software called VisiBroker for Java, a CORBA-based MES can be implemented. This study chooses the WIP tracking module as an example to illustrate the design of a CORBA-based MES.