Summary: | 碩士 === 中央警察大學 === 消防科學研究所 === 87 === ABSTRACT
Key words: Semiconductor Manufacture, Fire Safety, Cleanroom
The domestic installment code for the fire protection equipment of every kind of building, is generally based on the confined public buildings, excluding the increasing types of buildings for various purposes, such as the special places containing the super high space, refuge weakling places or high sensitive processing apparatus (in nuclear energy factories or in cleanrooms of semiconductor manufacture) for the commercial, academic or industrious purposes. It seems certainly important to research the characteristics of fire prevention, taking refuge and hazard factors in such places, and to find out the factors affecting safety and fire prevention design wherein.
Pertaining to the cleanroom, the requirements of the flammable and pyrophoric chemicals in the semiconductor production process result in quite considerable hazards. The fire hazards not only directly damage machinery equipment significantly (the subsequent smoke is in fact the fundamental reason causing huge loss), but also indirectly affect the production capacity of the plant, even the human life. Therefore, for the semiconductor manufacture, it is essential to make some detailed programs for the aim of fire prevention, fire suppression and fire protection, especially, to develop programs to protect the cleanroom and select different fire protection strategies (with corresponding equipment) for different fire protection stages.
Mainly referring to the airtight buildings composing of cleanrooms, this article focuses on microphysics, which causes life casualties and property damage severely in the fire, and discusses how to combine smoke control model, fire(smoke) prevention districts, fire equipment, tool layout and space distribution, to achieve the control of smoke fluid, the control of fire, and further, to achieve the land of no fire.
Citing the cleanroom in the semiconductor manufacture as an instance, the subject of this article is to take its particular fire prevention characteristics into account, and to research its safety factors besides fire safety design regulation by means of the advanced fire codes, fire accident cases analysis, fire protection evaluation system, and the suggestions of experts.
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