Research on the Architectural Planning of Integrated Circuit Fabrication Buildings--Sites in Hsin-chu Science-based Industrial Park as Example.

• Main Authors: Benjamin Liu, 劉弼民
• Other Authors: 解鴻年
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/64011882788494303023

碩士 === 中華大學 === 建築與都市計畫學系碩士班 === 87 === Key words: Integrated Circuit, Fabrication Buildings, Architectural Planning It has been 20 years since the first semiconductor company in Taiwan was established. Nowadays, Taiwan ranks fourth in the world in IC industry with 20 IC fabrication companies and a total of more than 30 manufacturing sites in Taiwan. Among all these IC fabrication companies, nineteen of them locate in Hsin-chu Science-based Industrial Park. It takes as much as 1 billion US dollars to build one semiconductor fabrication facility nowadays, while the manufacturing site and its peripheral facilities take up about 1/10 of the total expense. However, the local construction companies, engineering companies, and the academia accumulated little expertise about this construction know-how throughout the years. Hence, this thesis focuses on the research of the construction plan in building a complete IC fabrication facility. This research will first give an overview about high tech industry in Hsin-chu Science-based Industrial Park based on existing documents. Then, from analyzing the construction plans and diagrams of the filed IC fabrication facilities in Hsin-chu Science-based Industrial Park, this thesis will inspect the arrangements of space and facilities, clean rooms, emergency escaping designs, construction modules, etc. On the other hand, via questionnaires, this thesis collects the information of the utilization of these facilities as well as the connections with neighboring facilities, the air conditioning accommodations and the demand for emergency equipment. Lastly, the conclusion will base on the result of questionnaires collected by Delphi method to highlight the suggestions of a well-planned IC fabrication construction facility. The six major chapters of this thesis are listed as follows: Chapter 1 prefaces the intention, targets, research domain and content, study method and work flow of this thesis. Chapter 2 goes through the history of Hsin-chu Science-based Industrial Park and the IC companies in the Park. It also illustrates the regulations related to constructions within the Park. Chapter 3 classifies the development and expansion of IC fabrication facilities in Hsin-chu Science-based Industrial Park. It examines the construction costs, demand on energy, and analyzes the economic effectiveness of these expenses. Chapter 4 focuses on the construction plans. It inspects the space functionality of the facilities, air conditioning equipment, and the overall space characteristics to approach the issues that this research is to target. Chapter 5 reveals the result of questionnaires on the utilization of the fabrication facilities. By analyzing the responding questionnaires, this thesis discusses the interplay of the scale of space, room flexibility, emergency facilities, and distance between different processing product lines. Concludes from the result of Delphi method the general guideline to sketch a construction plan of an IC fabrication facility. Chapter 6 is the conclusion and suggestion of this thesis. It summarizes the result and gives suggestions to future research projects.