The Synthesis of the Large Area Polycrystalline Diamond Films
碩士 === 國立雲林科技大學 === 電子與資訊工程技術研究所 === 86 === In this research, the large area polycrystalline diamond films were synthesized for the X-ray lithography membranes on the 4 inches of diameter silicon wafers by Microwave Plasma Chemical Vapor Deposition system. The silicon wafer was polished b...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31711150821674669946 |