The Performance Test and Analysis of Silicon-based Microchabbel Structures

碩士 === 淡江大學 === 機械工程學系 === 86 ===   The concept of MCHS (micro channel heat sink) is to fabricate microchannel on silicon substrates by using micro - fabrication technique that is popular in IC industry. As the size of a channel reduces to the scale of □m, the thermal resistance of the so - called &...

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Bibliographic Details
Main Authors: Chen, Jong-Shun, 陳中舜
Other Authors: Kang, Shung-Wen
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/32378350276405244597