The Performance Test and Analysis of Silicon-based Microchabbel Structures
碩士 === 淡江大學 === 機械工程學系 === 86 === The concept of MCHS (micro channel heat sink) is to fabricate microchannel on silicon substrates by using micro - fabrication technique that is popular in IC industry. As the size of a channel reduces to the scale of □m, the thermal resistance of the so - called &...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/32378350276405244597 |