Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor

碩士 === 國立臺灣大學 === 應用力學研究所 === 86 ===

Bibliographic Details
Main Authors:	Chiu, Min-Han, 邱銘漢
Other Authors:	Tzong-Shyn Wung
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/55892904012250228761

id	ndltd-TW-086NTU00499036
record_format	oai_dc
spelling	ndltd-TW-086NTU004990362016-06-29T04:13:51Z http://ndltd.ncl.edu.tw/handle/55892904012250228761 Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor 晶圓快速熱處理爐之軸對稱熱流分析 Chiu, Min-Han 邱銘漢碩士國立臺灣大學應用力學研究所 86 Tzong-Shyn Wung 翁宗賢 --- 1998 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立臺灣大學 === 應用力學研究所 === 86 ===
author2	Tzong-Shyn Wung
author_facet	Tzong-Shyn Wung Chiu, Min-Han 邱銘漢
author	Chiu, Min-Han 邱銘漢
spellingShingle	Chiu, Min-Han 邱銘漢 Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor
author_sort	Chiu, Min-Han
title	Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor
title_short	Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor
title_full	Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor
title_fullStr	Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor
title_full_unstemmed	Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor
title_sort	numerical simulation of transient heat and flow transfer in a axisymmetric rapid thermal processor
publishDate	1998
url	http://ndltd.ncl.edu.tw/handle/55892904012250228761
work_keys_str_mv	AT chiuminhan numericalsimulationoftransientheatandflowtransferinaaxisymmetricrapidthermalprocessor AT qiūmínghàn numericalsimulationoftransientheatandflowtransferinaaxisymmetricrapidthermalprocessor AT chiuminhan jīngyuánkuàisùrèchùlǐlúzhīzhóuduìchēngrèliúfēnxī AT qiūmínghàn jīngyuánkuàisùrèchùlǐlúzhīzhóuduìchēngrèliúfēnxī
_version_	1718327949793427456

Numerical Simulation of Transient Heat and Flow Transfer in a Axisymmetric Rapid Thermal Processor

Similar Items