Accuracy Analysis of Ellipsometry Based Multi-layer Film Measurement Technique-Incident Angle Verification and Retrieval
碩士 === 國立臺灣大學 === 應用力學研究所 === 86 === Ellipsometers have long been used as a major tool for studying the index ofref raction and film thickness of multi-layer structures. Two major properties of ellipsometers are worth mentioning. Firstly, as the physical quantity of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12628102973832997203 |