Transduction and Compensation for Micro-machined Axis-symmetric Vibrating-shell Gyroscopes

• Main Authors: Cheng, I-Chun, 陳奕君
• Other Authors: Yuan-Fang Chou
• Format: Others
• Language: zh-TW
• Published: 1998
• Online Access: http://ndltd.ncl.edu.tw/handle/27340703443645039834

碩士 === 國立臺灣大學 === 機械工程學系研究所 === 86 === Nowadays, the theories related to axis-symmetric vibrating-shell gyroscopes are quite complete and well established. In this article, we carry on theelopm ent of micro-machined axis-symmetric resonant gyroscope and focus on the drivi ng and sensing for it. Furthermore, we also discuss the behavior of thegyrosco pe due to little asymmetry and introduce the methods of compensation. As to th e functions, axis-symmetric resonant gyroscopes can be used to directlymeasure not only the rotation rate but also the rotation angle. In the ratesensing mo des, force-to-rebalance method performs better than the open-loopmethod in the aspects of response time and sensing linearity. Moreover, in thewhole angle m odes, the periodic excitation method is much more practicable thanthe impulse excitation method. Besides, whole angle modes are better than therate sensing modes because they can reduce the drift due to integration andavoid encounteri ng the restriction from sensing threshold. We adop the capacitivetype to excit e, sense and compensate. The capacitive sensor reveals severaladvantages, such as extremely high sensitivity, low power consumption, and bettertemperature p erformance. Combining the advantages mentioned above and high-Q propertyof the resonantor, the micro-machined axis-symmetric vibrating-shell gyroscopescan p erform quite well.