| Summary: | 碩士 === 國立臺灣大學 === 機械工程學系研究所 === 86 === Nowadays, the theories related to axis-symmetric vibrating-shell gyroscopes
are quite complete and well established. In this article, we carry on theelopm
ent of micro-machined axis-symmetric resonant gyroscope and focus on the drivi
ng and sensing for it. Furthermore, we also discuss the behavior of thegyrosco
pe due to little asymmetry and introduce the methods of compensation. As to th
e functions, axis-symmetric resonant gyroscopes can be used to directlymeasure
not only the rotation rate but also the rotation angle. In the ratesensing mo
des, force-to-rebalance method performs better than the open-loopmethod in the
aspects of response time and sensing linearity. Moreover, in thewhole angle m
odes, the periodic excitation method is much more practicable thanthe impulse
excitation method. Besides, whole angle modes are better than therate sensing
modes because they can reduce the drift due to integration andavoid encounteri
ng the restriction from sensing threshold. We adop the capacitivetype to excit
e, sense and compensate. The capacitive sensor reveals severaladvantages, such
as extremely high sensitivity, low power consumption, and bettertemperature p
erformance. Combining the advantages mentioned above and high-Q propertyof the
resonantor, the micro-machined axis-symmetric vibrating-shell gyroscopescan p
erform quite well.
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