Design and Fabrication of Integrated Optical High-Voltage Sensor

• Main Authors: Jang, Je-Wei, 張哲維
• Other Authors: Way-Seen Wang
• Format: Others
• Language: zh-TW
• Published: 1998
• Online Access: http://ndltd.ncl.edu.tw/handle/02751437674358437650

碩士 === 國立臺灣大學 === 電機工程學系研究所 === 86 === An integrated optical high-voltage sensor realizes high-voltage sensing with the techniques of integrated optics. The one we proposed has three new featur es. First, the Mach-Zehnder interferometer and the prerequisite voltage divide r are integrated. Second, no extra process steps for the electrode buffer laye r are required. And the third, single polarization waveguides for electro-opti cal modulation are used. With the successful realization of all these features , the practical importance of the integrated optical high-voltage sensor is gr eatly enhanced.