Synthesis And Characterizations Of DLC Film And Carbon Nitride Compounds By Plasma Enhanced CVD

Synthesis And Characterizations Of DLC Film And Carbon Nitride Compounds By Plasma Enhanced CVD

博士 === 國立清華大學 === 材料科學工程研究所 === 86 ===

Bibliographic Details
Main Authors:	Sung, Shing-Li, 宋興禮
Other Authors:	Shih, Han-C
Format:	Others
Language:	en_US
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/85370670937626684730

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