The Research and Measurement of Large Scale Inductively Couplied Plasma

碩士 === 國立清華大學 === 工程與系統科學系 === 86 ===

Bibliographic Details
Main Authors:	Tsai, Szu-Che, 蔡世哲
Other Authors:	K.C Leou
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/65908860970303356694

id	ndltd-TW-086NTHU0593023
record_format	oai_dc
spelling	ndltd-TW-086NTHU05930232016-06-29T04:13:31Z http://ndltd.ncl.edu.tw/handle/65908860970303356694 The Research and Measurement of Large Scale Inductively Couplied Plasma 大面積電感式電漿源之研製與特性量測 Tsai, Szu-Che 蔡世哲碩士國立清華大學工程與系統科學系 86 K.C Leou 柳克強 1998 學位論文 ; thesis 92 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 工程與系統科學系 === 86 ===
author2	K.C Leou
author_facet	K.C Leou Tsai, Szu-Che 蔡世哲
author	Tsai, Szu-Che 蔡世哲
spellingShingle	Tsai, Szu-Che 蔡世哲 The Research and Measurement of Large Scale Inductively Couplied Plasma
author_sort	Tsai, Szu-Che
title	The Research and Measurement of Large Scale Inductively Couplied Plasma
title_short	The Research and Measurement of Large Scale Inductively Couplied Plasma
title_full	The Research and Measurement of Large Scale Inductively Couplied Plasma
title_fullStr	The Research and Measurement of Large Scale Inductively Couplied Plasma
title_full_unstemmed	The Research and Measurement of Large Scale Inductively Couplied Plasma
title_sort	research and measurement of large scale inductively couplied plasma
publishDate	1998
url	http://ndltd.ncl.edu.tw/handle/65908860970303356694
work_keys_str_mv	AT tsaiszuche theresearchandmeasurementoflargescaleinductivelycoupliedplasma AT càishìzhé theresearchandmeasurementoflargescaleinductivelycoupliedplasma AT tsaiszuche dàmiànjīdiàngǎnshìdiànjiāngyuánzhīyánzhìyǔtèxìngliàngcè AT càishìzhé dàmiànjīdiàngǎnshìdiànjiāngyuánzhīyánzhìyǔtèxìngliàngcè AT tsaiszuche researchandmeasurementoflargescaleinductivelycoupliedplasma AT càishìzhé researchandmeasurementoflargescaleinductivelycoupliedplasma
_version_	1718326148099735552

The Research and Measurement of Large Scale Inductively Couplied Plasma

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