Research of plasma polymerization C6F6 and HMDSO thin film

Research of plasma polymerization C6F6 and HMDSO thin film

碩士 === 國立清華大學 === 化學系 === 86 ===

Bibliographic Details
Main Authors:	Thou, Chia Jien, 鄒佳君
Other Authors:	Si-Chung Chang
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/41148444892309625292

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