Research of plasma polymerization C6F6 and HMDSO thin film

碩士 === 國立清華大學 === 化學系 === 86 ===

Bibliographic Details
Main Authors:	Thou, Chia Jien, 鄒佳君
Other Authors:	Si-Chung Chang
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/41148444892309625292

id	ndltd-TW-086NTHU0065055
record_format	oai_dc
spelling	ndltd-TW-086NTHU00650552016-06-29T04:13:30Z http://ndltd.ncl.edu.tw/handle/41148444892309625292 Research of plasma polymerization C6F6 and HMDSO thin film C6F6與HMDSO電漿聚合薄膜之研究 Thou, Chia Jien 鄒佳君碩士國立清華大學化學系 86 Si-Chung Chang 張錫強 1998 學位論文 ; thesis 90 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 化學系 === 86 ===
author2	Si-Chung Chang
author_facet	Si-Chung Chang Thou, Chia Jien 鄒佳君
author	Thou, Chia Jien 鄒佳君
spellingShingle	Thou, Chia Jien 鄒佳君 Research of plasma polymerization C6F6 and HMDSO thin film
author_sort	Thou, Chia Jien
title	Research of plasma polymerization C6F6 and HMDSO thin film
title_short	Research of plasma polymerization C6F6 and HMDSO thin film
title_full	Research of plasma polymerization C6F6 and HMDSO thin film
title_fullStr	Research of plasma polymerization C6F6 and HMDSO thin film
title_full_unstemmed	Research of plasma polymerization C6F6 and HMDSO thin film
title_sort	research of plasma polymerization c6f6 and hmdso thin film
publishDate	1998
url	http://ndltd.ncl.edu.tw/handle/41148444892309625292
work_keys_str_mv	AT thouchiajien researchofplasmapolymerizationc6f6andhmdsothinfilm AT zōujiājūn researchofplasmapolymerizationc6f6andhmdsothinfilm AT thouchiajien c6f6yǔhmdsodiànjiāngjùhébáomózhīyánjiū AT zōujiājūn c6f6yǔhmdsodiànjiāngjùhébáomózhīyánjiū
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Research of plasma polymerization C6F6 and HMDSO thin film

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