The study of copper diffusion on low k material treated by N2- plasma

碩士 === 國立清華大學 === 化學系 === 86 ===

Bibliographic Details
Main Authors:	Wu, Yi-Chin, 吳宜靜
Other Authors:	Chang Si-Chung
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/31416165329386224659

id	ndltd-TW-086NTHU0065008
record_format	oai_dc
spelling	ndltd-TW-086NTHU00650082016-06-29T04:13:30Z http://ndltd.ncl.edu.tw/handle/31416165329386224659 The study of copper diffusion on low k material treated by N2- plasma 低介電材料之氮氣電漿表面處理及銅金屬在其中擴散機制之研究 Wu, Yi-Chin 吳宜靜碩士國立清華大學化學系 86 Chang Si-Chung 張錫強 1998 學位論文 ; thesis 1 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 化學系 === 86 ===
author2	Chang Si-Chung
author_facet	Chang Si-Chung Wu, Yi-Chin 吳宜靜
author	Wu, Yi-Chin 吳宜靜
spellingShingle	Wu, Yi-Chin 吳宜靜 The study of copper diffusion on low k material treated by N2- plasma
author_sort	Wu, Yi-Chin
title	The study of copper diffusion on low k material treated by N2- plasma
title_short	The study of copper diffusion on low k material treated by N2- plasma
title_full	The study of copper diffusion on low k material treated by N2- plasma
title_fullStr	The study of copper diffusion on low k material treated by N2- plasma
title_full_unstemmed	The study of copper diffusion on low k material treated by N2- plasma
title_sort	study of copper diffusion on low k material treated by n2- plasma
publishDate	1998
url	http://ndltd.ncl.edu.tw/handle/31416165329386224659
work_keys_str_mv	AT wuyichin thestudyofcopperdiffusiononlowkmaterialtreatedbyn2plasma AT wúyíjìng thestudyofcopperdiffusiononlowkmaterialtreatedbyn2plasma AT wuyichin dījièdiàncáiliàozhīdànqìdiànjiāngbiǎomiànchùlǐjítóngjīnshǔzàiqízhōngkuòsànjīzhìzhīyánjiū AT wúyíjìng dījièdiàncáiliàozhīdànqìdiànjiāngbiǎomiànchùlǐjítóngjīnshǔzàiqízhōngkuòsànjīzhìzhīyánjiū AT wuyichin studyofcopperdiffusiononlowkmaterialtreatedbyn2plasma AT wúyíjìng studyofcopperdiffusiononlowkmaterialtreatedbyn2plasma
_version_	1718325996829016064

The study of copper diffusion on low k material treated by N2- plasma

Similar Items