Modeling, Identification and Temperature Controlof a Rapid Thermal Processing System
碩士 === 國立交通大學 === 電機與控制工程學系 === 86 === Rapid thermal processing is a state-of-the-art technique for performing in a single chamber the necessary wafer fabrication operation in semiconductor manufacture. In this thesis, we consider the m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10458084669429769808 |