The analysis of micro thermal buckling actuator in the micro fluidic system
碩士 === 國立成功大學 === 機械工程學系 === 86 === The micro fluidic parts which use micro fabricated technique, not only control the fluid accurately, but also respond rapidly, and their volume are tiny. We will take the actuator structure on the thermally buckling val...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84247646693257303935 |