The Investigation of Physical Properties of Boron-doped Semiconducting Diamond Films
碩士 === 國立成功大學 === 物理學系 === 86 === A highly oriented, (100) textured diamond film was grown on the substratesof silicon (100), followed by the deposition of an epitaxial boron-doped layer in microwave plasma-assisted chemical vapor depos...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52777136217350216610 |