Study of Exposure Position Control of the Mask Maker for Micro- Electro-Mechnical Systems
碩士 === 國立成功大學 === 工程科學系 === 86 === This study aims to develop a low cost, practical and powerful mask writer for MEMS by the technique of CAD/CAM to generate the pattern on the mask for fabrication process of MEMS. The hardware framewo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50704532398246318690 |