The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer

The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer

碩士 === 國立中興大學 === 電機工程學系 === 86 ===

Bibliographic Details
Main Authors: Huang, Yaw Huei, 黃耀輝
Other Authors: Kung Chung-Yuan
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/45743443304862162223
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spelling ndltd-TW-086NCHU14420092015-10-13T11:03:32Z http://ndltd.ncl.edu.tw/handle/45743443304862162223 The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer 高溫濕氧化對晶片內部微觀缺陷及其均勻性的影響 Huang, Yaw Huei 黃耀輝 碩士 國立中興大學 電機工程學系 86 Kung Chung-Yuan 貢中元 1998 學位論文 ; thesis 50 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立中興大學 === 電機工程學系 === 86 ===
author2 Kung Chung-Yuan
author_facet Kung Chung-Yuan
Huang, Yaw Huei
黃耀輝
author Huang, Yaw Huei
黃耀輝
spellingShingle Huang, Yaw Huei
黃耀輝
The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
author_sort Huang, Yaw Huei
title The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
title_short The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
title_full The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
title_fullStr The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
title_full_unstemmed The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
title_sort effect of wet oxidation on the micro-defects and their radial distribution in cz silicon wafer
publishDate 1998
url http://ndltd.ncl.edu.tw/handle/45743443304862162223
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