Investigations of the Growth of GaN Films on (001) GaAs and (1120) Sapphire Substrates

碩士 === 逢甲大學 === 材料科學研究所 === 86 ===   The purpose of this study is to explore the effect of the growth conditions and substrate structures on the crystal structure, crystallinity and optical properties of the grown GaN films. GaN films were grown on (001) GaAs and (1120) sapphire substrates by atomi...

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Bibliographic Details
Main Author: 黃世晟
Other Authors: 龔志榮
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/32404531544566075554

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