A study of Integrated Quantitative and Qualitative Factors for Wafer Fabrication Facility Layout

• Main Authors: Hong Rui-Hong, 洪瑞鴻
• Other Authors: Hsin Rau
• Format: Others
• Language: zh-TW
• Published: 1998
• Online Access: http://ndltd.ncl.edu.tw/handle/66816530018685776450

碩士 === 中原大學 === 工業工程研究所 === 86 === Wafer fabrication is a very expensive and promising industry. Recently,Taiwan''s semiconductor manufacturing industry is blooming, many wafer fabs areconstructing or planned to construct. The competition is getting higher and higher. How to plan an effective wafer fab is an important issue, and it will affect the productivity. This research studies the facility layout of waferfab and develops a cost model which considers both quantitative and qualitative aspects. In the quantitative area, as tradition, this study considers the flow quantities between bays; in the qualitative area, it considers the process, gaspiping, and cleanliness relationships between bays. Then, this study uses the method of simulated annealing and the theory of fuzzy set to find a near optimalsolution with the minimal cost for the model. This solution corresponds to thebest layout for the fab. This study uses a near-practical case as the test example, and we test for pure quantitative, pure qualitative, and integratedthree cases.