The static and dynamic optimization problems of rapid thermal processing
碩士 === 國立中正大學 === 化學工程研究所 === 86 === Thermal processing plays an important role of integrated circuit fabrication. It not only supplies the high temperature but also removes the defects using thermal annealing process. In recent years, t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91605299951615402746 |