Fabrication of Piezoelectric Thin Film SAW Device
碩士 === 國立臺灣大學 === 機械工程學系 === 85 === The design, fabrication and its performance of a piezoelectric thin film surface acoustic wave (SAW) device that uses MEMS micromachining technology were presented in this paper. The piezoelectric thin...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90890643151599654032 |