Fabrication of Nanostructures with Scanning Probe Microscope
碩士 === 國立臺灣大學 === 物理學系 === 85 === A method for fabricating nanostructures with an air-operated atomicforce microscpoe (AFM) is presented. An electrically conducting AFMtip is used to oxidize regions of size $\sim$ 30 nm. Increasing thescann...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27171113601118403550 |
| Summary: | 碩士 === 國立臺灣大學 === 物理學系 === 85 === A method for fabricating nanostructures with an air-operated
atomicforce microscpoe (AFM) is presented. An electrically
conducting AFMtip is used to oxidize regions of size $\sim$ 30
nm. Increasing thescanning speed, decreasing the applied voltage
and increasing theapplied force between the tip and the sample
are useful for drawingfiner oxide lines. The electric field
between the tip and thesample plays an important role on the
oxidation.
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