Angular distributions of sputtered particles from the single crystal

• Main Authors: Hsieh, Jiin-Yun, 謝錦雲
• Other Authors: Che-Chen Chang
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/91502019396965575510

碩士 === 國立臺灣大學 === 化學系研究所 === 85 === Secondary Ion Mass Spectrometry is a surface-sensitive technique for det ermining chemical bonding geometry on the surface. In fact, the angular distri bution of the secondary particles is a useful information in determining the s urface structure. Results of molecular dynamics simulations showed that the an gular distribution of the high-energy particles sputtered from the surface can be closely related to the original atomic arrangement of the crystal surface. Further, according to the sputter theory, at angles much greater than 45o fro m the surface normal, the polar angle of detection is believed to have little effect on the azimuth along which the maximum sputter intensity is observed. R esults of computer simulations showed that there is a close relationship betwe en the detection condition and the peak azimuth in the angular distribution of the ejected particles. We also focused on how the peak azimuth in the angular distribution of the particles sputtered from the single-crystal is influenced by the collision process.