Interfacial Reactions of Terbium and Erbium Thin Films on Silicon

博士 === 國立清華大學 === 材料科學與工程學研究所 === 85 === Interfacial reactions of Er and Tb thin films on silicon have been studied by cross-sectional and planview transmission electron microscopy, scanning electron microscopy, sheet resistance measurement, X-ray diffraction as well as differential scanning calorim...

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Bibliographic Details
Main Authors: Luo, Cheng-Hung, 羅正泓
Other Authors: Chen, Lih-Juann
Format: Others
Language:en_US
Published: 1997
Online Access:http://ndltd.ncl.edu.tw/handle/92495843583290138795