Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater
碩士 === 國立中央大學 === 機械工程學系 === 85 ===
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| Language: | zh-TW |
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1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26730063961569709187 |
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ndltd-TW-085NCU00489029 |
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ndltd-TW-085NCU004890292015-10-13T17:59:41Z http://ndltd.ncl.edu.tw/handle/26730063961569709187 Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater 旋轉塗佈光阻液厚度及均勻度實驗分析 Chien, Chieh-Yu 簡玠裕 碩士 國立中央大學 機械工程學系 85 Hsiau Shu-San 蕭述三 1997 學位論文 ; thesis 1 zh-TW |
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NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立中央大學 === 機械工程學系 === 85 ===
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| author2 |
Hsiau Shu-San |
| author_facet |
Hsiau Shu-San Chien, Chieh-Yu 簡玠裕 |
| author |
Chien, Chieh-Yu 簡玠裕 |
| spellingShingle |
Chien, Chieh-Yu 簡玠裕 Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater |
| author_sort |
Chien, Chieh-Yu |
| title |
Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater |
| title_short |
Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater |
| title_full |
Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater |
| title_fullStr |
Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater |
| title_full_unstemmed |
Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater |
| title_sort |
experimental analysis of the thickness and the uniformity of photoresist on a spin coater |
| publishDate |
1997 |
| url |
http://ndltd.ncl.edu.tw/handle/26730063961569709187 |
| work_keys_str_mv |
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