Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater

Experimental Analysis of the Thickness and the Uniformity of Photoresist on a Spin Coater

碩士 === 國立中央大學 === 機械工程學系 === 85 ===

Bibliographic Details
Main Authors:	Chien, Chieh-Yu, 簡玠裕
Other Authors:	Hsiau Shu-San
Format:	Others
Language:	zh-TW
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/26730063961569709187

Description
Summary:	碩士 === 國立中央大學 === 機械工程學系 === 85 ===