Numerical Analysis of Wind Shear Effect in Spin Coating

• Main Authors: Wong, Wai-Mun, 黃偉民
• Other Authors: Fu-Chu, Chou
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/39668584916337359438

碩士 === 國立中央大學 === 機械工程學系 === 85 === The process of spin coating has been extensively studied. However,to our knowledge, all studies related has either neglected or just appliedCochran's solution for the shear stress at the interface between the over-lying gas and the film surface. It is suitable when applied to a spin coaterunder free space and an infinite disk. However, for a real model where thereis an enclosure or a hub and a finite radius is taken into account, shearstress may differ from that of Cochran's solution. This study intends to in-investigate the effect of the enclosure, as well as, a hub on the shear stress . Results show the distribution of shear stress along the disk may not alike that of Cochran's solution, and may have to be re-evaluated.