| Summary: | 碩士 === 國立中央大學 === 機械工程學系 === 85 === The process of spin coating has been extensively
studied. However,to our knowledge, all studies related has
either neglected or just appliedCochran's solution for the shear
stress at the interface between the over-lying gas and the film
surface. It is suitable when applied to a spin coaterunder free
space and an infinite disk. However, for a real model where
thereis an enclosure or a hub and a finite radius is taken into
account, shearstress may differ from that of Cochran's solution.
This study intends to in-investigate the effect of the
enclosure, as well as, a hub on the shear stress . Results show
the distribution of shear stress along the disk may not alike
that of Cochran's solution, and may have to be re-evaluated.
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