Ion beam sputted TiO2 film with dopping Si,Al,SiO2

碩士 === 國立中央大學 === 光電(科學)研究所 === 85 === Oxides of Ti was deposited by ion beam sputter deposition with a Kaufman-type ion source.The dopping Al(Si,SiO2) improved stoichiometryand surface roughness of TiO2 film. To make a weakly absorbing...

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Bibliographic Details
Main Authors:	Lin, Jiun Horng, 林君鴻
Other Authors:	C. C. Lee
Format:	Others
Language:	zh-TW
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/29314131025327023545

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spelling	ndltd-TW-085NCU001230032015-10-13T17:59:40Z http://ndltd.ncl.edu.tw/handle/29314131025327023545 Ion beam sputted TiO2 film with dopping Si,Al,SiO2 離子濺鍍混和材料光學薄膜之特性 Lin, Jiun Horng 林君鴻碩士國立中央大學光電(科學)研究所 85 Oxides of Ti was deposited by ion beam sputter deposition with a Kaufman-type ion source.The dopping Al(Si,SiO2) improved stoichiometryand surface roughness of TiO2 film. To make a weakly absorbing filmof high index. C. C. Lee 李正中 1997 學位論文 ; thesis 85 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立中央大學 === 光電(科學)研究所 === 85 === Oxides of Ti was deposited by ion beam sputter deposition with a Kaufman-type ion source.The dopping Al(Si,SiO2) improved stoichiometryand surface roughness of TiO2 film. To make a weakly absorbing filmof high index.
author2	C. C. Lee
author_facet	C. C. Lee Lin, Jiun Horng 林君鴻
author	Lin, Jiun Horng 林君鴻
spellingShingle	Lin, Jiun Horng 林君鴻 Ion beam sputted TiO2 film with dopping Si,Al,SiO2
author_sort	Lin, Jiun Horng
title	Ion beam sputted TiO2 film with dopping Si,Al,SiO2
title_short	Ion beam sputted TiO2 film with dopping Si,Al,SiO2
title_full	Ion beam sputted TiO2 film with dopping Si,Al,SiO2
title_fullStr	Ion beam sputted TiO2 film with dopping Si,Al,SiO2
title_full_unstemmed	Ion beam sputted TiO2 film with dopping Si,Al,SiO2
title_sort	ion beam sputted tio2 film with dopping si,al,sio2
publishDate	1997
url	http://ndltd.ncl.edu.tw/handle/29314131025327023545
work_keys_str_mv	AT linjiunhorng ionbeamsputtedtio2filmwithdoppingsialsio2 AT línjūnhóng ionbeamsputtedtio2filmwithdoppingsialsio2 AT linjiunhorng lízijiàndùhùnhécáiliàoguāngxuébáomózhītèxìng AT línjūnhóng lízijiàndùhùnhécáiliàoguāngxuébáomózhītèxìng
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Ion beam sputted TiO2 film with dopping Si,Al,SiO2

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