Capacitive Pressure Sensor
碩士 === 國立交通大學 === 電子工程學系 === 85 === Semiconuctor sensors are usually fabricated using processes that is developedfor integrated circuits;furthermore,many specialized fabrication steps includeanisotropic etching to form diaphragm, and the u...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24738156853783879251 |