Study of temperature sensing system of rapid thermal processing

Study of temperature sensing system of rapid thermal processing

碩士 === 國立交通大學 === 控制工程系 === 85 === In this thesis, we surveyed the temperature sensing system of rapid thermalprocessing(RTP). The main problems of RTP are the uniformity and repeatability of wafer temperaturein the process of manufacturing. In order to o...

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Bibliographic Details
Main Authors:	ue, Jenq-Yow, 呂政祐
Other Authors:	Kai-Tai Song
Format:	Others
Language:	zh-TW
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/37389185359341669066

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