The Real Time Monitor and Controller of a Cu-CVD System(I)

• Main Authors: Chen, Chiang-Weng, 陳乾文
• Other Authors: Lon-Kou Chang
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/26321436092277951786

碩士 === 國立交通大學 === 控制工程系 === 85 === A real time monitor and controller for Cu-CVD system is proposed here. Itprovides a realiable processing for the Cu-CVD system. In our thesis, we designand categorize the whole system into two parts. One is designed in a PC which is used as the host supervisor computer of the whole system. The other is a real time interface controller, which is designed by using the Intel 8051 CPUcircuit. There are three interface controllers designed in this system. They are designed having the same circuits so that one can easily expand them anytime whenever he needs. For the host computer part, we have designed a monitorand control software operated under the Windows 95 operating system. The proposed software has the capabilities of (1)allowing the users to edit their process program,(2)remotely controlling the process of the system, (3)displaying the process status of values, the pressure gauges, the temperaturegauges in both of the text output and graphic output on the screen, and (4)allowing the users to operate the system manually and show the current statusof the system.