The Dynamic Analysis of Three-layer Polysilicon Lazy-tongs Microstructure with Comb-drive Actuator
碩士 === 國立交通大學 === 控制工程系 === 85 === A lazy-tongs microstructure with comb-drive actuator is designed and fabricated by three-layer polysilicon process. Virtual work principle,mechanics of material and Rayleigh method are used to evalute the drivingforce, s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15049399776613787041 |