The Dynamic Analysis of Three-layer Polysilicon Lazy-tongs Microstructure with Comb-drive Actuator

• Main Authors: Hu, Po-Song, 胡柏頌
• Other Authors: Chiou Jin-Chern
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/15049399776613787041

碩士 === 國立交通大學 === 控制工程系 === 85 === A lazy-tongs microstructure with comb-drive actuator is designed and fabricated by three-layer polysilicon process. Virtual work principle,mechanics of material and Rayleigh method are used to evalute the drivingforce, spring constant, and vibration frequence of comb-drive actuator.The sticking phenomenon also restricts the driving voltage and displacement. The dynamics of lazy-tings microstructure is derived from the differential-algebraic equation. We introduce PID controller and simulate the close-loopof structure combining comb-drive actuator. The numerical integration is modified by Baumgarte method. Results of simulation prove that under proper control the whole system not only presents good dynamic response but also provides exact position.