Study of Impacts of Plasma Hydrogenation and Back-End Integrated Processes on Polysilicon TFT Characteristics

Study of Impacts of Plasma Hydrogenation and Back-End Integrated Processes on Polysilicon TFT Characteristics

博士 === 國立成功大學 === 電機工程研究所 === 85 ===

Bibliographic Details
Main Authors:	Lee, Kan Yuan, 李泔原
Other Authors:	Yean Kuen Fang
Format:	Others
Language:	en_US
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/78486065797044249149

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