Study of Impacts of Plasma Hydrogenation and Back-End Integrated Processes on Polysilicon TFT Characteristics
博士 === 國立成功大學 === 電機工程研究所 === 85 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78486065797044249149 |