Preparation of high hard DLC by ECR-CVD
碩士 === 國立中興大學 === 材料工程學研究所 === 85 === This research concerns the production of DLC films of high hardness by means of ECR-CVD. During the experiments, the differences between the application of rf bias and dc bias are distinguished. On th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74333601415897195728 |