Semiconductor Equipment Communication Standard

• Main Authors: Yeh, Cheng-Shu, 葉整樹
• Other Authors: Lin Chin-Min
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/28120173188472208510

碩士 === 中華工學院 === 航空太空工程研究所 === 85 === Industrial automation is one of the major tasks that the government wants to accomplish for industry promotion for the past few years. Especially in the sharp competitive semiconductor industry, utilizing automatic manufacturing equipment to upgrade quantity and quality is the consensus in this field for years. There is no way to plan a whole automatic process system because automatic equipment is limited by machineitself or the communication interface problem among various machines. So global semiconductor equipment manufacturers league SEMI promulgated SECS communicationstandard in early 1980, SECS specified the interface signal between semiconductor manufacturing equipment andmaster monitoring controller and the content of communication information in order to promote automationof semiconductor manufacturing.The semiconductor automatic manufacturing process is used to integrate theindividual automatic equipment over the plant to approach the full automation without operator. This study is to develop an interface program to meet SECS standard and to control a xyz rotary table without SECS standard interface for primary process control to reach the goal of remote control and introducing the development of GEM interface as well as the comparison with SECS interface. The accuracy and moving range of rotary table are 0.18 arcsecond (0.0005 degree) and +/- 12 degree. Regarding software, SECS interface program and xyz rotary table driving program are written in BORLAND C language.