Chemical Vapor Deposition of Tin Dioxide and Vin Thin Films
碩士 === 國立中正大學 === 化學研究所 === 85 === Abstract In this research, a series of b-diketonato and carboxylato tin compounds have been systematically synthesized and examined as precursors for low-pressure chemical vapor deposition. These compo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05644898259570826064 |