Summary: | 碩士 === 元智工學院 === 機械工程學系 === 84 === Magnetic suspension had been widely applied to many systems
including magnetic bearing,magnetically levitatied vehicles,
precision machines and even wind tunnel. How about the system
apply to vibration isolation in horizontal direction ? In this
thesis we will discuss the problem and descirbe the preliminary
experimental result we achieved. To implemented the magnetic
levitation table, four sensors feedback the position of the
table ,and eight electromagnets as actuators,and three phase
lead controller compansate the phase were in use. In this way
the horizontol postion control system of magnetic levitation
table had the performnace with a position accuracy of 1.5 um
and a system close loop bandwidth of 5 Hz. In measuring the
open loop nature frequency of magnetic levitation table. We
applied an implusive force to the levitated table and record its
motion in the same time. The nature frequency measured is about
0.3 Hz. and the horizontal damping coefficient of the magnetic
levitation table is 0.5 N×sec/m.
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