The Horizontal Position Control System of Magnetic Levitation Table

碩士 === 元智工學院 === 機械工程學系 === 84 === Magnetic suspension had been widely applied to many systems including magnetic bearing,magnetically levitatied vehicles, precision machines and even wind tunnel. How about the system apply to vibration isolation in horiz...

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Bibliographic Details
Main Authors: Sheih, Shi-Horng, 謝適鴻
Other Authors: Chang-Huei Wu
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/03171670224759768342
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Summary:碩士 === 元智工學院 === 機械工程學系 === 84 === Magnetic suspension had been widely applied to many systems including magnetic bearing,magnetically levitatied vehicles, precision machines and even wind tunnel. How about the system apply to vibration isolation in horizontal direction ? In this thesis we will discuss the problem and descirbe the preliminary experimental result we achieved. To implemented the magnetic levitation table, four sensors feedback the position of the table ,and eight electromagnets as actuators,and three phase lead controller compansate the phase were in use. In this way the horizontol postion control system of magnetic levitation table had the performnace with a position accuracy of 1.5 um and a system close loop bandwidth of 5 Hz. In measuring the open loop nature frequency of magnetic levitation table. We applied an implusive force to the levitated table and record its motion in the same time. The nature frequency measured is about 0.3 Hz. and the horizontal damping coefficient of the magnetic levitation table is 0.5 N×sec/m.