Diffractive System Design via Iterative algorithm
碩士 === 國立臺灣科技大學 === 電子工程學系 === 84 === As integrated circuit technology continues to push further into the submicrometer regime, considerable effort has been devoted to finding means of extending the resolution limits of optical lithograp...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84075152251902159926 |