Magnetic Properties and Microstructure of Mn-Al-C Thin Films by RF Magnetron Sputtering
碩士 === 國立臺灣大學 === 材料科學(工程)研究所 === 84 === MnxAl100-x-yCy (x=35~65at%、y=0~2.4at%) thin films were prepared by r.f. magnetron sputtering, The microstructure chemical compositions and magnetic properties of Mn-Al-C thin films were investigated by X-ray diffr...
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1996
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Online Access: | http://ndltd.ncl.edu.tw/handle/29320843715642778942 |