A Chemical Beam Epitaxy system (CBE) of construction system for GexSi1-x epitaxial layer
碩士 === 國立清華大學 === 電機工程研究所 === 84 ===
Main Authors: | Guo; Jong Ru, 郭宗儒 |
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Other Authors: | Hwang Huey Liang |
Format: | Others |
Language: | en_US |
Published: |
1996
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Online Access: | http://ndltd.ncl.edu.tw/handle/51422470738303412824 |
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