The effect of dc-bias on the processing a-C:H by RF PECVD

The effect of dc-bias on the processing a-C:H by RF PECVD

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Wu, Tse Hsyan, 吳則賢
Other Authors:	Chou Lin Hsin
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/84459793137957902488

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