The effect of dc-bias on the processing a-C:H by RF PECVD

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Wu, Tse Hsyan, 吳則賢
Other Authors:	Chou Lin Hsin
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/84459793137957902488

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spelling	ndltd-TW-084NTHU01590592016-07-13T04:10:34Z http://ndltd.ncl.edu.tw/handle/84459793137957902488 The effect of dc-bias on the processing a-C:H by RF PECVD 偏壓對RFPECVD製作之非晶碳膜影響研究 Wu, Tse Hsyan 吳則賢碩士國立清華大學材料科學(工程)研究所 84 Chou Lin Hsin 周麗新 1996 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===
author2	Chou Lin Hsin
author_facet	Chou Lin Hsin Wu, Tse Hsyan 吳則賢
author	Wu, Tse Hsyan 吳則賢
spellingShingle	Wu, Tse Hsyan 吳則賢 The effect of dc-bias on the processing a-C:H by RF PECVD
author_sort	Wu, Tse Hsyan
title	The effect of dc-bias on the processing a-C:H by RF PECVD
title_short	The effect of dc-bias on the processing a-C:H by RF PECVD
title_full	The effect of dc-bias on the processing a-C:H by RF PECVD
title_fullStr	The effect of dc-bias on the processing a-C:H by RF PECVD
title_full_unstemmed	The effect of dc-bias on the processing a-C:H by RF PECVD
title_sort	effect of dc-bias on the processing a-c:h by rf pecvd
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/84459793137957902488
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The effect of dc-bias on the processing a-C:H by RF PECVD

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