Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD

Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Chou, Wei-Zen, 周偉仁
Other Authors:	Chou, Lih-Hsin
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/90869918474474461985

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