Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Chou, Wei-Zen, 周偉仁
Other Authors:	Chou, Lih-Hsin
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/90869918474474461985

id	ndltd-TW-084NTHU0159030
record_format	oai_dc
spelling	ndltd-TW-084NTHU01590302016-07-13T04:10:34Z http://ndltd.ncl.edu.tw/handle/90869918474474461985 Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD ECRPCVD製作之非晶形矽碳膜微結構及物性研究 Chou, Wei-Zen 周偉仁碩士國立清華大學材料科學(工程)研究所 84 Chou, Lih-Hsin 周麗新 1996 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===
author2	Chou, Lih-Hsin
author_facet	Chou, Lih-Hsin Chou, Wei-Zen 周偉仁
author	Chou, Wei-Zen 周偉仁
spellingShingle	Chou, Wei-Zen 周偉仁 Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD
author_sort	Chou, Wei-Zen
title	Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD
title_short	Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD
title_full	Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD
title_fullStr	Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD
title_full_unstemmed	Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD
title_sort	microstructure and physical properties of a-sic:h prepared by ecr pcvd
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/90869918474474461985
work_keys_str_mv	AT chouweizen microstructureandphysicalpropertiesofasichpreparedbyecrpcvd AT zhōuwěirén microstructureandphysicalpropertiesofasichpreparedbyecrpcvd AT chouweizen ecrpcvdzhìzuòzhīfēijīngxíngxìtànmówēijiégòujíwùxìngyánjiū AT zhōuwěirén ecrpcvdzhìzuòzhīfēijīngxíngxìtànmówēijiégòujíwùxìngyánjiū
_version_	1718344888699846656

Microstructure and Physical Properties of a-SiC:H Prepared by ECR PCVD

Similar Items